REM – FEI Helios Nano Lab 650

Hochauflösendes Feldemissions-Raster-Elektronenmikroskop mit 2 Säulen

Ausrüstung:

Electron beam
– 0.8 nm at 15 kV
– 1.5 nm at 200 V

Ion beam
– 4.0 nm at 30 kV using preferred statistical method
– 2.5 nm at 30 kV using selective edge method

– Elstar in-lens SE detector (TLD-SE)
– Elstar in-lens BSE detector (TLD-BSE)
– Everhart-Thornley SE detector (ETD)

Genesis & Team Energy Dispersive Spectroscopy (EDS) System
Multiple Gas Injection System (Carbon & Platinium)

Micromanipulator from Kleindiek
Lift Out Shuttle from Kleindiek
Eucentric five Axis Table from Kleindiek

Micromanipulator OmniProbe 200

Standort: Pharmazentrum (PZ U1007)