SEM – Philips XL30 ESEM

Technical specifications

  • Field emission scanning electron microscope with cryo unit from Gatan
  • Resolution electron beam:
    – 20 nm bei 30 kV (High vacuum and ESEM mode)

Detectors and micro analysis

  • SE detector
  • Backscattered electron detector (BSE)
  • GSED (gaseous secondary electron detector)
  • Energy dispersive X-ray micro analysis (EDX), EDAX Genesis 6.0 software
  • Modified by RemX GmbH, Adresse: Silberhölle 7, 76646 Bruchsal, Deutschland, Telefon: +49 7251 308397
  • DISS5 software from REM-X GmbH

Typical applications and accessories

  • Examination of biological and non-conductive specimens with high resolution
  • Sample observation in CP (Control Pressure) and WET-mode up to 10 Torr
  • Cold stage


Pharmazentrum, U1002


Cryo Preparation Unit Gatan Alto 2500

  • Nitrogen cold stage (-185°C to +50°C) and interface to SEM stage
  • Nitrogen ‘heat exchange’ dewar and gas feedthroughs to SEM chamber
  • Ball valve incorporating microswitches plus mechanical interlock and interface to SEM chamber
  • High vacuum cryo preparation chamber, with integral nitrogen dewar, sample platform and variable temperature facility (-185°C to +100°C)
  • Cold knife fracturing device
  • Binocular viewer, x10 and x20 magnification
  • Cold Magnetron sputter source for high resolution sputter coating (supplied with AuPd and Pt target)
  • Turbomolecular pump system for cryo preparation chamber
  • Keypad control unit for vacuum
  • ‘2-pot’ freezing station for producing nitrogen slush and loading pre-frozen samples
  • Self pressurising N2 dewar with gas flow regulator for cooling SEM cold stage and gas purging