SEM – Hitachi S-4800

Technical specifications

  • Cold field emission high-resolution scanning electron microscope
  • Resolution electron beam:
    – 1.0 nm at 15 kV
    – 1.4 nm at 1 kV
  • High and low magnification mode: 30x to 800’000x
  • DISS5 control software

Detectors

  • SE detector (normal)
  • SE in-lens detector
  • YAG backscattered elctron detector (BSE)

Typical applications

  • High-resolution topographic contrast imaging of solid materials

Location

Pharmazentrum, U1003

 

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