REM – FEI Nova Nano SEM 230

Technical specifications

  • Field emission column (Schottky)
  • Resolution electron beam:
    – 1.0 nm at 15 kV
    – 1.6 nm at 1 kV

Detectors and micro analysis

  • SE detector (Everhart-Thornley)
  • SE in-lens detector (TLD-SE)
  • Backscattered electron detector (TLD-BSE)
  • Octane Elite detector for Electron Dispersive X-Ray Spectroscopy (EDX), APEX software
  • Low Energy X-Ray Spectroscopy (LEXS)

Typical applications

  • Imaging and material analysis
  • Crystallographic determination on the nanoscale

Location

Pharmazentrum, U1002