SEM – FEI Nova Nano SEM 230

Technical specifications

• Field emission column (Schottky)
• Resolution electron beam:
  – 1.0 nm at 15 kV
  – 1.6 nm at 1 kV

Detectors and micro analysis

• SE detector (Everhart-Thornley)
• SE in-lens detector (TLD-SE)
• Backscattered electron detector (TLD-BSE)
• Octane Elite detector for Electron Dispersive X-Ray Spectroscopy (EDX), APEX software
• Low Energy X-Ray Spectroscopy (LEXS)

Typical applications

• Imaging and material analysis
• Crystallographic determination on the nanoscale

Location

Pharmazentrum, U1002