REM – FEI Nova Nano SEM 230
Technical specifications
- Field emission column (Schottky)
- Resolution electron beam:
– 1.0 nm at 15 kV
– 1.6 nm at 1 kV
Detectors and micro analysis
- SE detector (Everhart-Thornley)
- SE in-lens detector (TLD-SE)
- Backscattered electron detector (TLD-BSE)
- Octane Elite detector for Electron Dispersive X-Ray Spectroscopy (EDX), APEX software
- Low Energy X-Ray Spectroscopy (LEXS)
Typical applications
- Imaging and material analysis
- Crystallographic determination on the nanoscale
Location
Pharmazentrum, U1002
