SEM – FEI Helios Nano Lab 650

Technical specifications

  • High Resolution Field Emission (Schottky) Scanning Microscope (Dual Beam)
  • Resolution electron beam:
    – 0.8 nm at 15 kV
    – 1.5 nm at 200 V
  • Resolution ion beam:
    – 4.0 nm at 30 kV using preferred statistical method
    – 2.5 nm at 30 kV using selective edge method
  • Maximum sample size: 150 mm in diameter, 55 mm in height
  • Maximum sample weight: 500 g (incl. sample holder)

Detectors and micro analysis

  • Elstar in-lens SE detector (TLD-SE)
  • Elstar in-lens BSE detector (TLD-BSE)
  • Everhart-Thornley SE detector (ETD)
  • Energy Dispersive X-Ray Spectroscopy (EDX), Genesis & Team software

Typical applications and accessories

  • Imaging, analysis, milling, patterning of specimens down to the nanoscale
  • TEM lift out / TEM lamella
  • Nanofabrication and mikromanipulation
  • Multiple gas injection system for Pt-, W-, C-, Co- and H20- deposition
  • Correlative Microscopy (LM – SEM)
  • Micromanipulator from Kleindiek
  • Lift Out Shuttle from Kleindiek
  • Eucentric five Axis Table from Kleindiek
  • Micromanipulator OmniProbe 200

Location

Pharmazentrum, U1007