REM – FEI Helios Nano Lab 650

High Resolution Field Emission (Schottky) Scanning Microscope (Dual Beam)

Equipment:

Electron beam
– 0.8 nm at 15 kV 
– 1.5 nm at 200 V

Ion beam
– 4.0 nm at 30 kV using preferred statistical method
– 2.5 nm at 30 kV using selective edge method

– Elstar in-lens SE detector (TLD-SE)
– Elstar in-lens BSE detector (TLD-BSE)
– Everhart-Thornley SE detector (ETD)

Genesis & Team Energy Dispersive Spectroscopy (EDS) System
Multiple Gas Injection System (Carbon & Platinium)

Micromanipulator from Kleindiek
Lift Out Shuttle from Kleindiek
Eucentric five Axis Table from Kleindiek

Nano Admin Tool, Image Database, Web based System

Location: Pharmazentrum (PZ U1007)